論文 - 亀山 晃弘
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ファイバー型ファブリーペロー干渉計を用いた屈折率センサーの開発
亀山晃弘、榎田海渡、甲藤正人、横谷篤至
レーザー学会第588回研究会報告 ( 24 ) 7 - 12 2024年9月
担当区分:筆頭著者, 責任著者 記述言語:日本語 掲載種別:研究論文(研究会,シンポジウム資料等)
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エキシマランプによる光学薄膜用オーバーコート技術の開発
村上拓海、甲藤正人、亀山晃弘、甲藤正人、横谷篤至、吉田國雄
レーザー学会第578回研究会報告 ( 23 ) 1 - 5 2023年9月
記述言語:日本語 掲載種別:研究論文(研究会,シンポジウム資料等)
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田中 芳樹, 中井 健太, 奥村 勇之介, 亀山 晃弘, 甲藤 正人, 横谷 篤至
宮崎大学工学部紀要 51 29 - 33 2022年11月
記述言語:日本語 掲載種別:研究論文(学術雑誌) 出版者・発行元:宮崎大学工学部
Vacuum ultraviolet (VUV) with a wavelength of 100-200 nm has a photon energy of about 6-12 eV, which is higher than the binding energy of many substances, and has the feature of being able to break chemical bonds. We have applied these features to develop an analyzer named the Photon-stimulated Desorption Spectrometer. Since the spatial and temporal resolutions of this system are low due to adaption of incoherent light source, it is expected to improve by replacing the light source with an ultrashort pulsed VUV laser. In the present study, we have developed a focusing and irradiating system that enables various laser irradiation modes by overlapping multiple beams spatially and temporally. High-precision position control of the focusing and irradiating system is necessary for this purpose. Here, we used a number of micrometers with encoder that can be computercontrolled with a resolution of 1 μm to develop a double beam focusing and irradiating system using currently available ultrashort pulsed lasers with wavelengths of 800 nm and 400 nm. As a results, we confirmed that the smaller spot diameter was obtained by using the shorter wavelength. The spatial superposition can be performed within an accuracy range of ±3 μm, and the temporal superposition can be performed with an accuracy of 33 fs. Besides, interference fringes were obtained by angled irradiation of two light beams which can be expected to induce desorption in finer areas.
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高性能光ファイバーセンサーの開発
亀山晃弘、甲藤正人、横谷篤至
レーザー学会第567回研究会報告 RTM-22 ( 31 ) 29 - 33 2022年9月
担当区分:筆頭著者 記述言語:日本語 掲載種別:研究論文(研究会,シンポジウム資料等)
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レーザー脱離分析装置用集光照射部の開発
田中芳樹、中井健太、奥村勇之介、亀山晃弘、甲藤正人、横谷篤至
宮崎大学紀要 ( 50 ) 51 - 54 2022年5月
記述言語:日本語 掲載種別:研究論文(大学,研究機関等紀要)
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PLD法によって付着させたSi(111)-清浄表面上の金原子のSTM観察 査読あり
高田 大河, 田中 芳樹, 永崎 誠人, 亀山 晃弘, 甲藤 正人, 横谷 篤至
宮崎大学工学部紀要 50 51 - 54 2021年9月
記述言語:日本語 掲載種別:研究論文(学術雑誌) 出版者・発行元:宮崎大学工学部
To obtain important information for fabricating atomic-scale Au thin films that are used for biosensors, we have examined the flushing temperature for forming the Si(111) clean surface and observed the morphology of Au particles adsorbed by Pulsed Laser Deposition method on a Si(111)-7×7 surface by STM, which is supposed to be the initial stage of Au atomistic thin film formation. As the result of this study, it was found that flushing temperature must be controlled within 5℃ and we can fix the flushing requirement by STM images. Besides, we have estimated that Au particles are adsorbed on the position which is about 0.21 ± 0.03 nm away from the center of Si adatom.
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ファイバーブラック回折格子(FBG)センサーの高性能化
亀山晃弘、甲藤正人、横谷篤至
レーザー学会第555回研究会報告フォトニクスワークショップ in 九州 ( RTM-21-17 ) 7 - 11 2021年9月
担当区分:筆頭著者 記述言語:日本語 掲載種別:研究論文(研究会,シンポジウム資料等)
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PLD 法によって付着させた Si(111)- 清浄表面上の金原子の STM 観察
高田大河、田芳 樹、永崎誠人、亀山晃弘、甲藤正人、横谷篤至
宮崎大学工学部紀要 50 51 - 54 2021年9月
記述言語:日本語 掲載種別:研究論文(大学,研究機関等紀要)
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真空紫外・極端紫外光を用いた光脱離質量分析装置の開発 招待あり 査読あり
横谷 篤至,亀山 晃弘,加来 昌典,甲藤 正人
レーザー加工学会誌 27 ( 3 ) 19 - 26 2020年10月
記述言語:日本語 掲載種別:研究論文(学術雑誌)
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真空紫外・極端紫外光を用いた光脱離質量分析装置の開発 査読あり
横谷 篤至, 亀山 晃弘, 加来 昌典, 甲藤 正人
レーザ加工学会誌 27 ( 3 ) 131 - 136 2020年
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フェムト秒レーザーのダブルパルス照射によるシリコン加工の初期過程
甲藤正人、高田大河、亀山晃弘、横谷篤至
レーザー学会第537回研究会報告「次世代レーザー加工」 RTM-19-29〜34 25 - 30 2019年11月
記述言語:日本語 掲載種別:研究論文(学術雑誌)
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真空紫外光を用いたマテリアルプロセッシング
亀山晃弘、高田大河、甲藤正人、横谷篤至
レーザー学会第536回研究会報告(フォトニクスワークショップin 九州) RTM-19 37 - 42 2019年9月
記述言語:日本語 掲載種別:研究論文(研究会,シンポジウム資料等)
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レーザープロセッシングによる光学式センサーの高精度化技術の開発
亀山晃弘、加来昌典、甲藤正人、横谷篤至
レーザー学会第523回研究会報告レーザー応用 ( RTM-1827 ) 37 - 42 2018年9月
記述言語:日本語 掲載種別:研究論文(研究会,シンポジウム資料等)
We have developed the fabrication technique of high precision optical sensor by laser processing. In order to know growth process of atomic-level Au thin films, we have observed Au particles deposited by the pulsed laser deposition (PLD) method on Si clean surface by a scanning tunneling microscope (STM). As a result, the film-shaped clusters were found to have a structure of nearly monoatomic layers. We also demonstrated that a simple technique combining a 266 nm laser and a phase mask was quite effective at fabricating Fabry-Perot (FP) interferometer based on FBG and the fiber end-face. The interference pattern of the FP interferometer became sharper than that of one FBG.
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超高真空走査型トンネル顕微鏡によるSi清浄表面上のAu吸着粒子の観察
新原一希,野中光太郎,亀山晃弘,甲藤正人,横谷篤至
宮崎大学工学部紀要 ( 47 ) 95 - 98 2018年7月
記述言語:日本語 掲載種別:研究論文(大学,研究機関等紀要)
In order to know growth process of atomic-level Au thin films, we have observed Au particles deposited by the pulsed laser deposition(PLD) method on Si clean surface by an ultra high vacuum scanning tunneling microscope(UHV-STM). As the result of examination for forming the Si(111) cleaned surface, it was found that temperature of flushing should be controlled within 5℃. Besides, we have successfully estimated that the strucuture of the film-like cluster of Au is almost monoatomic layer based on the face-centered cubic(fcc) sturucture.
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ファイバーブラック回折格子(FBG)センサーの高性能化
亀山晃弘、加来昌典、甲藤正人、横谷篤至
レーザー学会第509回研究会報告(レーザー応用) 17 ( 22 ) 23 - 27 2017年9月
記述言語:日本語 掲載種別:研究論文(研究会,シンポジウム資料等)
Fiber Bragg Gratings (FBGs) have been used for measuring various physical quantities, such as distortion, temperature, refractive index and so on. These physical quantities are estimated from amount of the peak shifts of the core modes of the FBG. The narrower the main peak, the more precision measurement is expected. Besides, it is also expected for the precise measurement to obtain single isolated main peak without any additional peaks so-called side lobes. From this point of view, we have tried to reduce the intensity of the side lobes by means of the Moiré apodization technique, and to get a narrower main peak by utilizing the Fabry-Perot interferometer with FBGs (FP-FBG).
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Nanoscale thin film growth of Au on Si(111)-7 × 7 surface by pulsed laser deposition method 査読あり
Yokotani A., Kameyama A., Nakayoshi K., Matsunaga Y.
Optical Materials 65 112 - 116 2017年3月
記述言語:英語 掲載種別:研究論文(国際会議プロシーディングス) 出版者・発行元:Optical Materials
© 2016 Elsevier B.V.To obtain important information for fabricating atomic-scale Au thin films that are used for biosensors, we have observed the morphology of Au particles adsorbed on a Si(111)-7 × 7 surface, which is supposed to be the initial stage of Au atomistic thin film formation. Au particles were adsorbed on the clean Si surface using a PLD method, and the adsorbed particles were observed using a scanning tunneling microscope. As the number of laser shots was increased in the PLD method, the size of the adsorbed particle became larger. The larger particles seemed to form clusters, which are aggregations of particles in which each particle is distinguished, so we call this type of cluster a film-shaped cluster. In this work, we have mainly analyzed this type of cluster. As a result the film-shaped clusters were found to have a structure of nearly monoatomic layers. The particles in the clusters were gathered closely in roughly a 3-fold structure with an inter particle distance of 0.864 nm. We propose a model for the cluster structure by modifying Au(111) face so that each observed particle consists of three Au atoms.
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傾斜型ブラック回折格子(TFBG)センサーによる液体の屈折率計測 招待あり 査読あり
亀山晃弘、加来昌典、甲藤正人、横谷篤至
レーザー学会誌レーザー研究 45 ( 1 ) 26 - 30 2017年1月
記述言語:日本語 掲載種別:研究論文(学術雑誌)
Tilted fiber Bragg grating (TFBG) is expected to be used for such sensors as refractometers, twist sensors, liquid level sensors, chemical sensors and biosensors. We review its fabrication techniques and its refractive index measurements and developed a simplified technique to fabricate TFBG for simultaneous measurements of the refractive index and the temperatures of liquids. We used a combination of a 4ω Nd:YAG laser and a phase mask, which is simpler than a conventional method using a 2ω cw Ar+ laser and a Lloyd mirror interferometer. We calculated TFBG’s cladding modes by the multi-layer method and estimated the temperature coefficient of the water’s refractive index to be about -1×10-4 /K using our fabricated TFBG sensor.
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傾斜型ブラック回折格子(TFBG)センサーによる液体の屈折率計測
亀山晃弘、加来昌典、甲藤正人、横谷篤至
レーザー学会研究会495回研究会(レーザー応用)報告 16 ( 28 ) 27 - 32 2016年9月
記述言語:日本語 掲載種別:研究論文(研究会,シンポジウム資料等)
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超音波気化支援装置を用いた真空紫外光CVDによる石英様薄膜の常圧形成に関する研究
桑水流康記、井上裕貴、亀山晃弘、横谷篤至
宮崎大学工学部紀要 45 2016年7月
記述言語:日本語 掲載種別:研究論文(大学,研究機関等紀要)
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Kameyama A., Katto M., Yokotani A.
Japanese Journal of Applied Physics 55 ( 6 ) 2016年6月
記述言語:英語 掲載種別:研究論文(学術雑誌) 出版者・発行元:Japanese Journal of Applied Physics
© 2016 The Japan Society of Applied Physics.We considered the influence of the core and cladding diameters on the simultaneous measurement of the refractive index and temperature of liquids using a tilted fiber Bragg grating (TFBG). When the cladding diameter of a TFBG was only reduced from 125 to 123 μm, the calculated refractive index differed by 0.0068 from the expected value. When the core diameter was reduced from 9.6 to 7.8 μm, the change was less than 0.0005. We found that equalization of cladding diameter is required to improve the precision of the simultaneous measurement of the refractive index and temperature of liquids.