論文 - 迫田 達也
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Plasma grooving system using atmospheric pressure surface discharge plasma
Hamada T., Sakoda T., Otsubo M.
Plasma Chemistry and Plasma Processing 29 ( 3 ) 197 - 204 2009年6月
記述言語：日本語 掲載種別：研究論文（学術雑誌） 出版者・発行元：Plasma Chemistry and Plasma Processing
To fabricate narrow front contact grooves on a single crystalline silicon solar cell, we carried out etching of a silicon nitride film on a silicon substrate using the surface discharge plasma operated at atmospheric pressure. The control of groove width by changing the discharge voltage (V d ) and the length of a back electrode (l) used for formation of the surface discharge was examined. It was found that narrower electrode grooves could be obtained when l was short. For the case of l = 2 mm, the narrowest groove of 116 μm was obtained at V d = 3.5 kV and the processing time (t e ) of 10 s. © 2009 Springer Science+Business Media, LLC.
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Hamada T., Sakoda T., Otsubo M.
Materials Science in Semiconductor Processing 12 ( 3 ) 106 - 112 2009年6月
記述言語：日本語 掲載種別：研究論文（学術雑誌） 出版者・発行元：Materials Science in Semiconductor Processing
Fabrications of narrow electrode grooves for front electrodes on single crystalline silicon solar cells were examined using surface discharges, in which the electrode grooves were formed by etching a silicon nitride (SiN) film on substrates. The surface discharge could effectively etch the SiN film within 10 s and that a high etching rate more than 1800 nm/min was obtained. An optimum ratio of Ar gas, which was enough to maintain the formation of innumerable surface streamers, was 2.3 times larger than that of etching gas, and a short-term etching with the high discharge voltage was effective to narrow groove width. © 2009 Elsevier Ltd. All rights reserved.
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Dynamic Drop Testにおけるポリマー材料の撥水性低下に及ぼす水滴の帯電の影響 査読あり
枦健一, 椎原大輝, 荒田由浩, 迫田達也, 大坪昌久
電気学会論文誌A 129 ( 5 ) 386 - 387 2009年5月
記述言語：日本語 掲載種別：研究論文（学術雑誌）
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Plasma Grooving System Using Atmospheric Pressure Surface Discharge Plasma 査読あり
Toshiyuki Hamada, Tatsuya Sakoda, Masahisa Otsubo
Plasma Chemistry and Plasma Processing 29 197 - 204 2009年5月
記述言語：英語 掲載種別：研究論文（学術雑誌）
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山本 拓也, 黒瀬 充晴, 迫田 達也, 大坪 昌久, 鎗光 隆義, 永里 信也, 赤岩 繁
電気関係学会九州支部連合大会講演論文集 2009 ( 0 ) 213 - 213 2009年
記述言語：日本語 掲載種別：研究論文（学術雑誌） 出版者・発行元：電気・情報関係学会九州支部連合大会委員会
現在、稼働期間が20 年を経過した変圧器が増加しているため、それらの経年劣化が危惧されている。柱上変圧器の場合、吸湿や腐食により絶縁材料である絶縁油や絶縁紙が劣化し、耐電圧強度や機械的強度が低下する。また、雷害による突発事故が起こると、巻線間で部分放電が発生し、巻線で焼損が起こる。瞬時の停電も許されない現在、如何に早期に微弱な異常現象を検出できるかが重要となっている。本研究では、部分放電の検出可能なAE法を用い、課電状態で絶縁劣化診断を行うことを目標としている。本報告では、油中に配置した模擬電極で放電を発生させ、放電に伴うAE信号の観測を行い、本手法における検出下限を検討した。
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黒瀬 充晴, 山本 拓也, 迫田 達也, 大坪 昌久, 鑓光 隆義, 永里 信也, 赤岩 繁
電気関係学会九州支部連合大会講演論文集 2009 ( 0 ) 214 - 214 2009年
記述言語：日本語 掲載種別：研究論文（学術雑誌） 出版者・発行元：電気・情報関係学会九州支部連合大会委員会
高度成長期に多量に導入された変圧器等の経年劣化が懸念されている中、低コストで安易な劣化診断技術の確立が急務となっている。雷により被害を受けた柱上変圧器内では巻線間で部分放電が発生して絶縁劣化が進行する。瞬時の停電も許されない現在、早期に微弱な異常現象を検出できるかが重要となっている。本研究では、部分放電の検出可能なAE法を用い、課電状態で絶縁劣化診断を行う事を目標としている。尚、変圧器内部は巻線や鉄心が存在するため、構成物がAE波の伝播にどのような影響を与えるか明らかにする必要がある。本報告では、実際の柱上変圧器を用い、油中で発生させた模擬放電パルスによるAE波の伝播特性を検討した結果を報告する。
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Maeda I., Kaneko T., Takenouchi O., Miyake T., Sakoda T., Otsubo M., Fukumoto S., Tokumitsu A., Kai T., Ando M.
Proceedings of the International Symposium on Electrical Insulating Materials 577 - 580 2008年12月
記述言語：日本語 掲載種別：研究論文（学術雑誌） 出版者・発行元：Proceedings of the International Symposium on Electrical Insulating Materials
We pay attention to an insulation diagnosis technique of on-line hydrogenerator stator windings. On-line partial discharge monitoring and diagnosis of the insulation of hydrogenerator machines can be expected to reduce their maintenance costs. Therefore, we aim at development of the hybrid diagnostic method that ultrasonic wave signal occurring by partial discharge and leakage current flowing through neutral grounding cable of hydrogenerator. We set up many AE (acoustic emission) sensors to stator core and set up a CT (current transformer) sensor at neutral grounding cable of hydrogenerator. We measured AE signal and neutral grounding cable leakage current of hydrogenerator on stream. Furthermore, we set up measurement equipment in a hydrogenerator wing channel and measured AE signal and leakage current flowing at neutral grounding cable by partial discharge for a long term. In this paper, we have measured the relationship of on-line hydrogenerator out put and AE signal and leakage current flowing at neutral grounding cable. And, we have measured the AE signal and leakage current on the dielectric loss tangent test and partial discharge pulse at off-line test.
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Shiibara D., Haji K., Sakoda T., Otsubo M.
Proceedings of the International Symposium on Electrical Insulating Materials 99 - 102 2008年12月
記述言語：日本語 掲載種別：研究論文（学術雑誌） 出版者・発行元：Proceedings of the International Symposium on Electrical Insulating Materials
A study on the development of deterioration / performance evaluation method for outdoor electric insulation of polymer materials is pushed forward now in the International Council on Large Electric Systems (CIGRE). The small scale docimasy (Dynamic Drop Test) which could evaluate a disappearance characteristic of the hydrophobicity easily was suggested [1] . This test method is to evaluate the loss of hydrophobicity to drop electrically-charged water droplets on the sample surface continuously. We applied this dynamic drop test (DDT) to polymer materials which differ in the amount of Alumina Tri-Hydrate (ATH) filled and investigated factors about the change of hydrophobicity, in which the surface roughness and difference of the quantity of migration of the low molecular weight (LMW) were examined.
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Influence of temperature variation on characteristics of ZnO elements
Miyakawa Y., Sakoda T., Otsubo M., Ikuta M.
Proceedings of the International Symposium on Electrical Insulating Materials 119 - 122 2008年12月
記述言語：日本語 掲載種別：研究論文（学術雑誌） 出版者・発行元：Proceedings of the International Symposium on Electrical Insulating Materials
Zinc oxide (ZnO) surge arresters with series gap are equipped to protect the electricity failure for power distribution systems. Although the ZnO surge arresters might have enough performances to protect the electricity failure when they were installed, the performance may decrease with the increase of the number of operation times and the time elapsed after the installation. The aim of this study is to investigate the effects of temperature variation on characteristics of ZnO elements. We first heated ZnO elements up to temperatures of 350K, 400K, 450K, and 500K, and then characteristics of V-t and 50% flashover voltage were examined. Next, in order to obtain V-I characteristic, the impulse current with 4/10μs-8kA was applied at each temperature. Finally, V-t characteristic and 50% flashover voltage for each temperature were evaluated, again. The results showed that temperature had an influence on V-I characteristics of ZnO surge arrester. Finally, V-t characteristics and 50% flashover voltages for each temperature were evaluated, again. The results showed that temperature had an influence on V-I characteristics of ZnO surge arrester.
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Relation between leakage current and NSDD on the surface of polymer insulator
Yamashita Y., Miyake T., Haji K., Sakoda T., Otsubo M.
Proceedings of the International Symposium on Electrical Insulating Materials 103 - 106 2008年12月
記述言語：日本語 掲載種別：研究論文（学術雑誌） 出版者・発行元：Proceedings of the International Symposium on Electrical Insulating Materials
This paper describes relation between leakage current and non solubility deposits density (NSDD) on the surface of a polymer insulator. Until now, we have studied outdoor polymer insulators in the coastal region in west Japan. In addition we proposed a novel on-line monitoring system, adopting differential techniques to separate the leakage current of outdoor polymer insulators into three components such as a conductive current, a corona discharge and a dry band arc discharge current. The results indicated that leakage current was influenced by NSDD rather than equipment solubility deposits density (ESDD). In this study, the test to clarity the above stated factor was performed.
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高気圧沿面放電による太陽電池用電極溝の作製 査読あり
濱田俊之, 荒川純一, 大坪昌久, 迫田達也
電気学会論文誌A 128-A ( 12 ) 733 - 739 2008年12月
記述言語：英語 掲載種別：研究論文（学術雑誌）
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Studies on Erosion of Silicone Rubber Exposed to Partial Arc Discharges 査読あり
Kenich Haji, Yong Zhu, Masahisa Otsubo, Tatsuya Sakoda
Polymer Degradation and Stability 93 ( 12 ) 2214 - 2221 2008年12月
記述言語：英語 掲載種別：研究論文（学術雑誌）
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Haji K., Shiibara D., Arata Y., Sakoda T., Otsubo M.
Annual Report - Conference on Electrical Insulation and Dielectric Phenomena, CEIDP 2008 272 - 275 2008年12月
記述言語：日本語 掲載種別：研究論文（学術雑誌） 出版者・発行元：Annual Report - Conference on Electrical Insulation and Dielectric Phenomena, CEIDP
This paper describes the results of experiments made to examine characteristics of hydrophobicity of ATH-filled silicone rubber specimen surface. As the examination method, we used a dynamic drop test (DDT), in which electrolyte solution droplet from an electrode continuously dropped on a sample and the ac voltage was supplied between electrodes. Hydrophobicity loss times of samples for various conductivities of electrolyte solutions were measured. The electric fields before and after hydrophobicity reduction were evaluated The results showed that the hydrophobicity loss time became short with the increase of conductivity and the electric field increased after hydrophobicity reduction. © 2008 IEEE.
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Fabrication of electrode groove on silicon solar cell using high-pressure surface discharge
Hamada T., Arakawa S., Otsubo M., Sakoda T.
IEEJ Transactions on Fundamentals and Materials 128 ( 12 ) 733 - 739 2008年12月
記述言語：日本語 掲載種別：研究論文（学術雑誌） 出版者・発行元：IEEJ Transactions on Fundamentals and Materials
We proposed a low-cost plasma process technique to fabricate narrower front electrode grooves on a single crystalline silicon solar cell, in which the surface discharge operated at high-pressure etched the silicon nitride film of 150 nm thickness on a silicon layer. The results showed that the surface discharge could effectively etch the silicon nitride film in a short time and that a high etching rate more than 3000 nm/min was obtained. The narrow and uniform grooves with the width of less than 70 μm were obtained when the pressure in a chamber, the back electrode length and the etching time were 152 kPa, 2 mm and 10 s respectively. The narrower electrode groove could be obtained when the back electrode length was short and the pressure was high. © 2008 The Institute of Electrical Engineers of Japan.
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Studies on erosion of silicone rubber exposed to partial arc discharges
Haji K., Zhu Y., Otsubo M., Sakoda T.
Polymer Degradation and Stability 93 ( 12 ) 2214 - 2221 2008年12月
記述言語：日本語 掲載種別：研究論文（学術雑誌） 出版者・発行元：Polymer Degradation and Stability
The effect of electrolyte conductivity on the partial arc discharge development between two electrolyte electrodes on a silicone rubber sheet surface was investigated. Tests were executed by placing the salt-waterlogged glass-filter paper on a silicone rubber sheet to simulate a polluted electrolyte layer, and partial arc discharges with a constant current value of 10 mA were observed. It was found that the formation of an arc channel and a temperature distribution on the sample surface varied with the electrolyte conductivity. In addition, the relation between the electrolyte conductivity and the weight loss due to the heat erosion of specimens was also investigated by a 3D morphological observation and a simulated calculation. The partial arc discharge did significantly not influence on the sample surface erosion under serious polluted conditions. In contrast, the severest erosion appeared under the light pollution with comparatively lower conductivity of the electrolyte electrodes. © 2008.
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Studies of elastic waves in ethylene propylene rubber using acoustic emission sensor
Takaoka M., Sakoda T., Otsubo M., Akaiwa S., Iki M., Nakano S.
IEEJ Transactions on Fundamentals and Materials 128 ( 10 ) 641 - 646 2008年12月
記述言語：日本語 掲載種別：研究論文（学術雑誌） 出版者・発行元：IEEJ Transactions on Fundamentals and Materials
The aim of our study is to investigate the relationship between lowering of the insulation performance of cross-linked polyethylene (CV) cable and partial discharges (PDs) followed by the dielectric breakdown and to establish a diagnostic technique using an acoustic emission (AE) sensor. In this study, we focused on characterization of AE signals detected from ethylene propylene rubbers (EPRs) used as insulating materials of CV cables. Elastic waves with various frequencies were added to the surface of the EPR, and then characteristics of the detected AE signals due to the elastic waves propagated in the EPR were evaluated. We showed characteristics of Lamb waves whose low frequency components around 100 kHz were large and their small attenuation characteristics. © 2008 The Institute of Electrical Engineers of Japan.
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Etching of Silicon Nitride Using Atmospheric Pressure Surface Discharge Plasma 査読あり
T. HAMADA, M. OTSUBO, T. SAKODA
The 7th International Conference on Materials Processing for AMFT7005_1 - 3 2008年11月
記述言語：英語 掲載種別：研究論文（国際会議プロシーディングス）
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Surface modification of carbon electrodes using an argon plasma
Tashima D., Sakamoto A., Taniguchi M., Sakoda T., Otsubo M.
Vacuum 83 ( 3 ) 695 - 698 2008年10月
記述言語：日本語 掲載種別：研究論文（学術雑誌） 出版者・発行元：Vacuum
In this work, an activated carbon sheet was modified, to improve capacitance and energy density of electric double layer capacitors (EDLCs). Surfaces were treated with plasma for selected times of 1, 5, 10, 20, and 30 min. The plasma source was a DC glow discharge in argon gas. The pressure was 20 Pa and the distance between positive and negative electrodes was 20 mm. DC power was 70 W. The activated carbon sheets were set up so that the sheets were covered with the DC glow discharge. The results showed that plasma treatment led to roughening of the surface of the activated carbon sheets which became more pronounced for increased time. This was attributed to an increased surface area caused by argon plasma etching. For discharge times greater than 10 min, contamination from sputtered PTEE in the chamber appeared to have a smoothing effect and led to a reduction of the measured surface area. Capacitance of the EDLCs cells with the activated carbon sheets after 1 min plasma surface treatment was increased by 2% compared to EDLCs cells with the original activated carbon sheet. The results have shown that the modification by plasma treatment of activated carbon sheets is a suitable technique for EDLCs used in high current applications. © 2008 Elsevier Ltd. All rights reserved.
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Characteristics Evaluation of the Partial Arc Discharge and the Silicone Rubber Surface by Dynamic Drop Test 査読あり
Haji, Kenichi; Shiibara, Daiki; Otsubo, Masahisa, Sakoda Tatsuya, Yoshihiro Arata
2008 Annual Report Conference on Electrical Insulation Dielectric Phenomena 272 - 275 2008年10月
記述言語：英語 掲載種別：研究論文（国際会議プロシーディングス）
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Surface Modification of Carbon Electrode using Argon Plasma 査読あり
D. Tashima, A. Sakamoto, M. Taniguchi, T. Sakoda, M. Otsubo
Vacuum 83 ( 3 ) 695 - 698 2008年10月
記述言語：英語 掲載種別：研究論文（学術雑誌）