論文 - 迫田 達也
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誘電体バリア放電を用いた電気二重層キャパシタ用カーボン電極の表面改質
江崎 正敏, 高田 真司, 田島 大輔, 迫田 達也, 大坪 昌久
電気関係学会九州支部連合大会講演論文集 2007 ( 0 ) 461 - 461 2007年
記述言語：日本語 掲載種別：研究論文（学術雑誌） 出版者・発行元：電気・情報関係学会九州支部連合大会委員会
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山下 洋平, 枦 健一, 椎原 大輝, 三宅 琢磨, 迫田 達也, 大坪 昌久
電気関係学会九州支部連合大会講演論文集 2007 ( 0 ) 146 - 146 2007年
記述言語：日本語 掲載種別：研究論文（学術雑誌） 出版者・発行元：電気・情報関係学会九州支部連合大会委員会
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松田 芳久, 城戸 慎太郎, 池田 幸一郎, 迫田 達也, 馬場 誠二, 久木崎 雅人
電気関係学会九州支部連合大会講演論文集 2007 ( 0 ) 389 - 389 2007年
記述言語：日本語 掲載種別：研究論文（学術雑誌） 出版者・発行元：電気・情報関係学会九州支部連合大会委員会
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メタルハライドランプの遅相形点灯回路における高調波電流の低減と発光効率の評価
叶 明文, 黒住 正明, 迫田 達也, 大坪 昌久
電気関係学会九州支部連合大会講演論文集 2007 ( 0 ) 249 - 249 2007年
記述言語：日本語 掲載種別：研究論文（学術雑誌） 出版者・発行元：電気・情報関係学会九州支部連合大会委員会
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Sung Y., Yuji T., Sakoda T.
Proceedings - International Symposium on Discharges and Electrical Insulation in Vacuum, ISDEIV 2 600 - 603 2006年12月
記述言語：日本語 掲載種別：研究論文（学術雑誌） 出版者・発行元：Proceedings - International Symposium on Discharges and Electrical Insulation in Vacuum, ISDEIV
Characteristics of radio-frequency (RF) plasma-enhanced vapor deposition (PE-CVD) for the growth of carbon nanotubes (CNTs) in a CH,/N 2 mixed gas were investigated through characterization of the prepared CNTs and a numerical simulation. The preparation of the CNTs was performed by the single chamber plasma process where the catalyst sputter deposition using a capacitively coupled plasma (CCP) and the PE-CVD using a inductively coupled plasma were carried out in the same discharge chamber. The plasma chemistry which is useful for optimizing preparation conditions was evaluated using the numerical code which could calculate the temporal evolution of particle densities in the plasma. The results showed the usefulness of the single chamber process system. It was also found that CH4, HCN and C 2 H 6 radicals mainly contributed to the growth of CNTs. © 2006 IEEE.
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Monitoring of an MgO degradation in AC plasma display panel using multivariate analysis method
Sung Y., Ikeda K., Honda C., Sakoda T.
Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers 45 ( 10 B ) 8104 - 8108 2006年10月
記述言語：日本語 掲載種別：研究論文（学術雑誌） 出版者・発行元：Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
To investigate the degradation process of the MgO layer in a plasma display panel (PDP) discharge cell, measurements of Mg particles emitted from the surface of the MgO layer during an ac-PDP discharge were performed using the laser-induced fluorescence (LIF) technique. The spatial distribution of LIF signals agreed with the erosion pattern of the surface of the MgO layer. It was also found that a Mahalanobis-Taguchi system (MTS) where multi-dimensional measured values (e.g., discharge current, voltage, and luminance) were consolidated and converted into a standard was useful for the quantitative evaluation of the degradation degree of PDP discharge cells. © 2006 The Japan Society of Applied Physics.
DOI： 10.1143/JJAP.45.8104
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Sakoda T., Hamada T., Matsukuma K., Herai H., Matsui K., Nagasawa K.
Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers 45 ( 5 A ) 3992 - 3993 2006年5月
記述言語：日本語 掲載種別：研究論文（学術雑誌） 出版者・発行元：Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
A new etching technique, which is useful for the formation of electrode grooves for finger and busber electrodes on solar cells, was examined using a surface discharge at atmospheric pressure. A silicon nitride film was etched along boundary lines between discharge electrodes covered with a dielectric layer and the film. It was found that intensive surface streamers play an essential role in the etching of the film and that a high etching rate more than 150nm/min could be obtained. © 2006 The Japan Society of Applied Physics.
DOI： 10.1143/JJAP.45.3992
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Plasma treatment on electrode surfaces of bifacial silicon solar cells
Sakoda T., Sung Y., Matsukuma K.
Solar Energy Materials and Solar Cells 90 ( 7-8 ) 1089 - 1097 2006年5月
記述言語：日本語 掲載種別：研究論文（学術雑誌） 出版者・発行元：Solar Energy Materials and Solar Cells
To lower the fabrication cost of silicon solar cells, a surface treatment using a dielectric barrier discharge (DBD) instead of a wet cleaning technique was examined on electrode surfaces on silicon solar cells. The fill factor obtained through measuring current-voltage characteristics was evaluated, and the treated surface state was characterized by energy-dispersive X-ray. It was found that the DBD effectively activated the electrode surface and the surface treatment on finger electrodes contributed greatly to improve the fill factor. © 2005 Elsevier B.V. All rights reserved.
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Measurement of low-frequency ultrasonic wave in water using an acoustic fiber sensor
Sakoda T., Sonoda Y.
IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control 53 ( 4 ) 761 - 766 2006年4月
記述言語：日本語 掲載種別：研究論文（学術雑誌） 出版者・発行元：IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
An acoustic fiber sensor for measurement of ultrasonic waves, which used the approximate Raman-Nath diffraction effect where light diffraction waves were generated in an optical fiber by strain due to the ultrasonic waves, was proposed and examined. In order to characterize the acoustic fiber sensor as a basic study, measurements of low-frequency ultrasonic waves in water were examined using a step index fiber operating as a detection sensor. The results showed that characteristics of detected signals agreed with the theoretical prediction based on Fraunhofer diffraction. This indicates that our proposed fiber sensor can be used for the detection of low-frequency ultrasonic waves as well as the transmission of light diffraction signals. © 2006 IEEE.
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Optimum conditions for ozone formation in a micro dielectric barrier discharge
Sung Y., Sakoda T.
Surface and Coatings Technology 197 ( 2-3 ) 148 - 153 2005年7月
記述言語：日本語 掲載種別：研究論文（学術雑誌） 出版者・発行元：Surface and Coatings Technology
Micro-dielectric barrier discharge has attracted attention as a practical solution to realize an atmospheric pressure glow discharge process suitable for the surface treatments including ozone generation. In order to investigate the optimum conditions for the effective ozone formation in a micro-dielectric barrier discharge, measurements of ozone concentration were carried out for various conditions such as the gap length, the dielectric material and the operating gas. It was found that the optimum discharge conditions extremely differed in the kinds of the operating gases and the dielectric materials. In dry air, the dielectric material with the low dielectric constant and thermal conductivity, which might contribute the restriction of the gas temperature rise in the discharge region, was effective to obtain the high ozone yield and concentration. The optimum gap length was considered to be in the range of 0.6-0.8 mm. In oxygen, using a quartz glass disk as the dielectric material, the required condition to obtain the high ozone yield and concentration was expanded. © 2004 Published by Elsevier B.V.
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Sakoda Tatsuya, Matsukuma Kunihiro, Sung Youl-Moon, Otsubo Kouji, Tahara Minoru, Nakashima Yoshihiro
Japanese Journal of Applied Physics 44 ( 4 ) 1730 - 1731 2005年
記述言語：日本語 掲載種別：研究論文（学術雑誌） 出版者・発行元：公益社団法人 応用物理学会
To reduce the light reflection from surfaces of single-crystalline solar cells, a new surface texturing technique using a dielectric barrier discharge was proposed and examined on wet-textured surfaces of single-crystalline Si substrates. Minute uneven structures were additionally formed on the entire area of a wet-textured surface of pyramid-like shape. When the discharge voltage was 3.5 kV, the reflectance was less than 8% at wavelengths from 400 to 1000 nm and showed a minimum of 5.3% at 520 nm.
DOI： 10.1143/JJAP.44.1730
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Activation of electrode surface on silicon solar cell using dielectric barrier discharge
Sakoda T., Matsukuma K., Araki I., Sung Y., Terakawa T., Furukawa K.
Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers 43 ( 6 A ) 3275 - 3280 2004年6月
記述言語：日本語 掲載種別：研究論文（学術雑誌） 出版者・発行元：Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
To yield an activated electrode surface on a silicon solar cell, a surface treatment was examined using a dielectric barrier discharge instead of a wet cleaning technique. After the dry cleaning process using the dielectric barrier discharge, the surface state and the fill factor of the solar cell were evaluated. The results showed that the dielectric barrier discharge plasma could effectively activate the electrode surface of the solar cell in a relatively short time. Additionally, it was found that the surface treatment on finger electrodes played an essential role in the improvement of the fill factor.
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Activation of Electrode Surface on Silicon Solar Cell Using Dielectric Barrier Discharge
Sakoda Tatsuya, Matsukuma Kunihiro, Araki Ichiro, Sung Youl-Moon, Terakawa Takeshi, Furukawa Katsuhiko
Japanese Journal of Applied Physics 43 ( 6 ) 3275 - 3280 2004年
記述言語：日本語 掲載種別：研究論文（学術雑誌） 出版者・発行元：公益社団法人 応用物理学会
To yield an activated electrode surface on a silicon solar cell, a surface treatment was examined using a dielectric barrier discharge instead of a wet cleaning technique. After the dry cleaning process using the dielectric barrier discharge, the surface state and the fill factor of the solar cell were evaluated. The results showed that the dielectric barrier discharge plasma could effectively activate the electrode surface of the solar cell in a relatively short time. Additionally, it was found that the surface treatment on finger electrodes played an essential role in the improvement of the fill factor.
DOI： 10.1143/JJAP.43.3275
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Otsubo M., Hashiguchi T., Honda C., Takenouchi O., Sakoda T., Hashimoto Y.
IEEE Transactions on Dielectrics and Electrical Insulation 10 ( 6 ) 1053 - 1060 2003年12月
記述言語：日本語 掲載種別：研究論文（学術雑誌） 出版者・発行元：IEEE Transactions on Dielectrics and Electrical Insulation
This paper describes a novel method to separate the leakage current, obtained in polymeric materials during a salt fog aging test, into three components of conductive current, corona discharge current and dry band arc discharge current. First, we investigated that the relationship between optical emissions due to discharges and a leakage current. Based on experimentally defined discharge types, the separation of the leakage current was carried out. Finally, the polymer surface was analyzed using an electron spectroscopy for chemical analysis (ESCA), and the change in the polymeric constituents was evaluated. The results showed that the cumulative charges due to the dry band arc discharge and the corona discharge to the total charge were about 20 and 10%, respectively. It was also found that a high temperature vulcanized (HTV) silicone rubber could retain its insulation performance better than a room temperature vulcanized (RTV).
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Transmission and detection of light diffraction signal by low-frequency ultrasonic wave
Sakoda T., Sonoda Y.
Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers 42 ( 9 A ) 5821 - 5825 2003年9月
記述言語：日本語 掲載種別：研究論文（学術雑誌） 出版者・発行元：Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Measurement of low-frequency ultrasonic waves in water was examined by the light diffraction effect of a visible laser beam. This laser beam was much narrower than the ultrasonic wavelength. Characteristics of detected signals agreed well with the theoretical prediction based on Fraunhofer diffraction. As shown in the results, light diffraction waves transmitted through a polarization-maintaining fiber could be detected correctly. The results enable us to construct a novel optical fiber sensor which will be used for the detection of low-frequency ultrasonic waves as well as the transmission of light diffraction signals.
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Sung Y., Sakoda T.
Surface and Coatings Technology 166 ( 2-3 ) 135 - 140 2003年3月
記述言語：日本語 掲載種別：研究論文（学術雑誌） 出版者・発行元：Surface and Coatings Technology
This paper reports a result of rather sophisticated measurement in a magnetic neutral loop discharge (NLD) etcher system. The spatial profiles of electron temperature T e and density n e were measured for an extended region including the downstream of the source using laser Thomson scattering technique. Also, based on these profiles and ion current density measured by a double probe, experimental and numerical investigation for the entire structure of electron behavior was performed. The results showed that the high-density plasma produced around the magnetic neutral loop (NL) is transferred from the NL region to the downstream region along magnetic force lines. © 2002 Elsevier Science B.V. All rights reserved.
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Observation of copper atoms behavior in a vacuum arc discharge using laser spectroscopy
Sung Y., Hayashi Y., Okraku-Yirenkyi Y., Otsubo M., Honda C., Sakoda T.
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films 21 ( 1 ) 180 - 185 2003年1月
記述言語：日本語 掲載種別：研究論文（学術雑誌） 出版者・発行元：Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
The behavior of Cu particles emitted from the electrode designed as an imitation of a vacuum valve of the vacuum circuit breaker (VCB) was observed using the laser induced fluorescence (LIF) technique with a filtered camera that could detect the optical radiation due to Cu particles in the excited state. From the results of the LIF measurements, it was confirmed that Cu particles were emitted and distributed between electrodes even after the discharge finished. In addition, the density of Cu particles was high around the anode region.
DOI： 10.1116/1.1531141
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Studies on electron behaviors at downstream region of a neutral loop discharge plasma
Sakoda T., Sung Y.
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films 20 ( 6 ) 1964 - 1968 2002年11月
記述言語：日本語 掲載種別：研究論文（学術雑誌） 出版者・発行元：Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
The measurements of ion current density, electron density and electron temperature at the plasma downstream region in a neutral loop discharge (NLD) plasma were performed. It was concluded that the obtained profiles of the ion current density, electron temperature and electron density at the downstream and throughout the intermediate regions were the mirror of profiles at the plasma source regions. The quantitative evaluation phase was included after the Thomson scattering measurements.
DOI： 10.1116/1.1513644
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Two-dimensional modeling and optimization of a neutral loop discharge etcher in an argon plasma
Okraku-Yirenkyi Y., Sung Y., Otsubo M., Honda C., Sakoda T.
Surface and Coatings Technology 149 ( 2-3 ) 185 - 191 2002年1月
記述言語：日本語 掲載種別：研究論文（学術雑誌） 出版者・発行元：Surface and Coatings Technology
In order to ascertain the optimal conditions for plasma generation in a magnetic neutral loop discharge (NLD), experiments were conducted to determine the electron temperature, T c and electron density, n c distributions around the NL. For the plasma production efficiency, the ion flux density measurements were done. The experimental results were examined by using a model that included effects of a three-dimensional electromagnetic field with spatial decay of the RF electric field, and the limitation of the spatial extent of the electron motion and collision effect. From the experiments and modeling of the electron behavior, it was found that NLD plasma possesses the electron temperature T e and density n e peaks around the NL and there existed an optimum value of the magnetic field gradient for efficient plasma production. © 2002 Elsevier Science B.V. All rights reserved.
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Sakoda T., Okraku-Yirenkyi Y., Sung Y., Otsubo M., Honda C.
Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers 40 ( 11 ) 6607 - 6612 2001年11月
記述言語：日本語 掲載種別：研究論文（学術雑誌） 出版者・発行元：Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
In order to reveal the conditions required for the formation of a neutral loop discharge (NLD) plasma, distributions of excited atoms that are closely related to the distributions of the ionization rates were measured under various discharge conditions. Measurements of the distributions of these excited atoms were performed by laser induced fluorescence spectroscopy and optical emission spectroscopy. It was found that the results of these measurements were consistent with the theoretically predicted dependencies of electron heating on the magnetic field strength, the radio frequency (RF) electric field, and the frequency of the RF source. In addition, it was shown that the effects of electron-neutral collisions and of the finite size of the device set limitations on the formation of the NLD plasma.