論文 - 加来 昌典
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原野 慎也, 松本 亮大, 甲藤 正人, 加来 昌典, 窪寺 昌一
レーザー学会研究会報告 = Reports on the Topical meeting of the Laser Society of Japan 391 1 - 5 2009年9月
記述言語：日本語 掲載種別：研究論文（学術雑誌）
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Harmonics generation in VUV spectral region driven by a NIR Ti: Sapphire laser in rare gases
Katto M., Oda K., Kaku M., Kubodera S., Yokotani A., Miyanaga N., Mima K.
Proceedings of SPIE - The International Society for Optical Engineering 7131 2009年9月
記述言語：日本語 掲載種別：研究論文（学術雑誌） 出版者・発行元：Proceedings of SPIE - The International Society for Optical Engineering
In vacuum ultraviolet (VUV) spectral region, coherent light sources are being thus in high demand for advanced precise and microscopic processing. A sub-picosecond VUV light source at 126 nm has been produced by the nonlinear wavelength up-conversion of a near infrared femtosecond Ti:Sapphire laser at 882 nm in rare gases. We obtained the maximum output of the 7 th harmonic at 126 nm in Xe at the pressure of around 2 Torr. The 126 nm beam will be amplified by an optical-field-ionization produced Ar 2 * medium and then high-power sub-picosecond VUV pulses will be obtained. © 2009 SPIE.
DOI： 10.1117/12.817004
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EUV and debris characteristics of a laser-plasma tin-dioxide colloidal target
Kubodera S., Kakua M., Tougea S., Kattob M.
Proceedings of SPIE - The International Society for Optical Engineering 7131 2009年9月
記述言語：日本語 掲載種別：研究論文（学術雑誌） 出版者・発行元：Proceedings of SPIE - The International Society for Optical Engineering
Characteristics of extreme ultraviolet (EUV) and debris emissions as well as debris reduction have been investigated for a laser-produced plasma (LPP) EUV source by using a colloidal/liquid jet target containing tin dioxide nanoparticles and tin chloride. The amount of deposited debris on a silicon witness plate was determined by a total laser energy irradiated onto a target. Double-pulse laser irradiation was effective for improving the EUV conversion efficiency as a result of plasma regulation. It was, however, not effective for reducing the deposited debris from a colloidal target with nanoparticles. In situ low-temperature heating of the witness plate was effective to reduce the amount of deposited debris. Room-temperature photon processing using an incoherent vacuum ultraviolet excimer lamp at 126 nm deoxidized a deposited tin oxide layer. In addition to these active debris reduction methods, the use of a tin chloride liquid target at a certain concentration passively reduced the amount of deposited debris as a result of production of chlorine atoms that sputtered and/or etched deposition. The EUV CE of more than 1% was observed from a tin chloride target by using double-pulse laser irradiation. ©2009 SPIE.
DOI： 10.1117/12.816882
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OFI argon excimer amplifier for intense subpicosecond VUV pulse generation
Kakua M., Kuboderaa S., Odaa K., Kattob M., Yokotanib A., Miyanagac N., Mimac K.
Proceedings of SPIE - The International Society for Optical Engineering 7131 2009年9月
記述言語：日本語 掲載種別：研究論文（学術雑誌） 出版者・発行元：Proceedings of SPIE - The International Society for Optical Engineering
We have demonstrated an OFI Ar2* excimer VUV amplifier at 126 nm pumped by a high-intensity laser in the table top size. We observed the Ar2* excimer emission centered at 126 nm with the spectral bandwidth of 10 nm (FWHM), which was produced in the OFI plasma. Significant amplification was observed inside the OFI Ar2* excimer as a result of the optical feedback provided by a VUV reflector. The gain-length product of 5.6 was observed at the Ar pressure of 11 atm. The population inversion density on the order of 1017 cm-3 was evaluated inside the OFI plasma, which would be sufficient for the amplification of a subpicosecond VUV pulse at 126 nm produced by the harmonic generation. © 2009 SPIE.
DOI： 10.1117/12.820060
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加来 昌典, 原野 慎也, 松本 亮大, 長谷 渉, 圖師 裕也, 甲藤 正人, 窪寺 昌一
電気学会研究会資料. OQD, 光・量子デバイス研究会 2009 ( 59 ) 1 - 6 2009年9月
記述言語：日本語 掲載種別：研究論文（学術雑誌）
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Mass spectrometric study of photo dissociation of organic molecules by vacuum-ultraviolet irradiation for development of analysis technique 査読あり
Makoto Wasamoto, Masahito Katto, Masanori Kaku, Shoichi Kubodera, Atsusi Yokotani
Applied Surface Science 255 9861 - 9863 2009年9月
記述言語：英語 掲載種別：研究論文（学術雑誌）
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高強度レーザー励起真空紫外アルゴンエキシマレーザー
原野慎也，松本亮大，甲藤正人，加来昌典，窪寺昌一
レーザー学会第391回研究会報告 RMT-09-24 1 - 5 2009年9月
記述言語：日本語 掲載種別：研究論文（その他学術会議資料等）
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超短パルスコヒーレント光発生
加来昌典，原野慎也，松本亮大，長谷渉，圖師裕也，甲藤正人，窪寺昌一
電気学会研究会資料 光・量子デバイス研究会 OQD-09-59 1 - 6 2009年9月
記述言語：日本語 掲載種別：研究論文（その他学術会議資料等）
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Debris characteristics and mitigation of a laser plasma tin-contained liquid jet/droplet targets
Kaku M., Touge S., Katto M., Kubodera S.
Proceedings of SPIE - The International Society for Optical Engineering 7271 2009年6月
記述言語：日本語 掲載種別：研究論文（学術雑誌） 出版者・発行元：Proceedings of SPIE - The International Society for Optical Engineering
We realized a laser-plasma EUV target, which satisfied the high EUV CE and the debris suppression simultaneously by using low-concentration liquid jet/droplet targets containing tin oxides and chlorides. Plasma regulation by double pulse irradiation improved the EUV CE. In terms of the debris emissions, we reduced the amount of the deposited tin oxide by applying in situ heat and high-energy photons onto a witness plate. These active debris suppression resulted in the decrease of the deposition rate and deoxidation of the debris, respectively. The use of tin chloride liquid target also realized a well-balanced debris behavior, where deposited debris was cleaned by chlorine atoms or ions, resulting in an approximately zero deposition rate. ©2009 SPIE.
DOI： 10.1117/12.813479
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OFI rare-gas excimer amplifier for high-intensity VUV pulse generation
Katto M., Kaku M., Oda K., Kamikihara T., Yokotani A., Kubodera S., Miyanaga N., Mima K.
Proceedings of SPIE - The International Society for Optical Engineering 7196 2009年5月
記述言語：日本語 掲載種別：研究論文（学術雑誌） 出版者・発行元：Proceedings of SPIE - The International Society for Optical Engineering
We have demonstrated an argon excimer vacuum ultraviolet (VUV) amplifier at 126 nm by using the optical-field induced ionization (OFI) of argon. The gain-length product of 5.6 was achieved as a result of the optical feedback inside the amplifier with a VUV mirror. Plasma self-channeling caused by the high-intensity pump laser was simultaneously observed when the maximum gain-length product was observed. We have also optimized the output power of a subpicosecond VUV seed beam at 126 nm produced in low-pressure rare-gases as a result of the seventh harmonic nonlinear wavelength conversion of a Ti:Sapphire laser at 882 nm. © 2009 SPIE.
DOI： 10.1117/12.807339
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OFI argon excimer amplifier for intense subpicosecond VUV pulse generation 査読あり
Masanori Kaku, Shoichi Kubodera, Kazuyoshi Oda, Masahito Katto, Atsushi Yokotani, Noriaki Miyanaga and Kunioki Mima
Proceedings of SPIE 7131 71311C 2009年4月
記述言語：英語 掲載種別：研究論文（国際会議プロシーディングス）
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Harmonics generation in VUV spectral region driven by a NIR Ti:sapphire laser in rare gases 査読あり
Masahito Katto, Kazuyoshi Oda, Masanori Kaku, Shoichi Kubodera, Atsushi Yokotani, Noriaki Miyanaga and Kunioki Mima
Proceedings of SPIE 7131 2009年4月
記述言語：英語 掲載種別：研究論文（国際会議プロシーディングス）
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EUV and debris characteristics of a laser-plasma tin-dioxide colloidal target 査読あり
Shoichi Kubodera, Masanori Kaku, Shunsuke Touge, and Masahito Katto
Proceedings of SPIE 7131 71311O 2009年4月
記述言語：英語 掲載種別：研究論文（国際会議プロシーディングス）
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Debris characteristics and mitigation of a laser plasma tin-contained liquid jet/droplet targets 査読あり
Masanori Kaku, Shunsuke Touge, Masahito Katto, and Shoichi Kubodera
Proceedings of SPIE 7271 727132 2009年3月
記述言語：英語 掲載種別：研究論文（国際会議プロシーディングス）
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OFI rare-gas excimer amplifier for high-intensity VUV pulse generation 査読あり
Masahito Katto, Masanori Kaku, Kazuyoshi Oda, Tadashi Kamikihara, Atsushi Yokotani, and Shoichi Kubodera
Proceedings of SPIE 7196 71960L1 2009年2月
記述言語：英語 掲載種別：研究論文（国際会議プロシーディングス）
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長谷 渉, 圖師 裕也, 加来 昌典, 甲藤 正人, 窪寺 昌一
電気関係学会九州支部連合大会講演論文集 2009 ( 0 ) 172 - 172 2009年
記述言語：日本語 掲載種別：研究論文（学術雑誌） 出版者・発行元：電気・情報関係学会九州支部連合大会委員会
We have generated vacuum ultraviolet (VUV) pulses at 126 nm by nonlinear wavelength conversion of a subpicosecond Ti:Sapphire laser pulse at 882nm. We have been measuring autocorrelation of the VUV coherent emission by multiphoton ionization of rare gases. Two divided VUV beams in a Michelson interferometer were overlapped to produce multiphoton ionization in a rare gas, which led to autocorrelation of subpicosecond VUV pulses.
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甲藤 正人, 小田 一義, 上木原 忠, 和佐本 真, 高野 智也, 亀山 晃弘, 加来 昌典, 窪寺 昌一, 横谷 篤至, 宮永 憲明, 三間 國興
レーザー学会研究会報告 = Reports on the Topical meeting of the Laser Society of Japan 381 5 - 10 2008年12月
記述言語：日本語 掲載種別：研究論文（学術雑誌）
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紫外・真空紫外光源の開発と光プロセスへの応用
甲藤正人，小田一義，上木原忠，和佐本真，高野智也，亀山晃弘，加来昌典，窪寺昌一，横谷篤至，宮永憲明，三間國興
レーザー学会第381回研究会報告 RTM-08-43 5 - 10 2008年12月
記述言語：日本語 掲載種別：研究論文（その他学術会議資料等）
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EUV and debris characteristics of a laser-plasma tin dioxide nano-particle colloidal jet target
Kaku M., Suetake S., Senba Y., Katto M., Kubodera S.
Proceedings of SPIE - The International Society for Optical Engineering 6921 2008年12月
記述言語：日本語 掲載種別：研究論文（学術雑誌） 出版者・発行元：Proceedings of SPIE - The International Society for Optical Engineering
Debris characteristics and its reduction have been investigated for a laser-produced plasma (LPP) extreme ultraviolet (EUV) source using a colloidal jet target containing tin dioxide nano-particles. Dominant deposited debris on a witness plate was found to have a form of oxidized tin (SnO x ) originated from nano-particles. Quantitative debris amounts were determined by total laser energy irradiated onto a target, not by laser irradiation modes, such as single or double pulse irradiation. In-situ low-temperature (100 °C) heating of a plate was effective to reduce the deposited debris amount, since colloidal debris was easily vaporized by the heat. Another approach to remove the deposited debris was roomtemperature photon processing using incoherent vacuum ultraviolet (VUV) emission at 126 nm. X-ray photoelectron spectroscopy (XPS) analysis has shown that the deposited SnOx debris layer was deoxidized by the 126 nm VUV photon energy.
DOI： 10.1117/12.771542
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Optical amplification of the OFI rare-gas excimers in the vacuum ultraviolet
Kaku M., Harano S., Touge S., Katto M., Yokotani A., Kubodera S., Miyanaga N., Mima K.
Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS 832 - 833 2008年12月
記述言語：日本語 掲載種別：研究論文（学術雑誌） 出版者・発行元：Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS
We report the optical amplification in a compact OFI rare-gas excimer VUV amplifier and the generation of femtosecond VUV seed pulses using the harmonic conversion of an infrared Ti:Sapphire laser. ©2008 IEEE.